Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1978-12-28
1980-06-24
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250397, G01M 2300
Patent
active
042096987
ABSTRACT:
A transmission-type charged particle beam apparatus comprising a vacuum elope enclosing, first means, having at least ten individual charged particle sources to separately produce at least ten individual charged particle beams, second means to supporting a specimen to be investigated; third means to project each of the beams along a different beam path through a predetermined region of the specimen, the beam paths collectively converging about a rotational axis of symmetry at equal angles of at least 30.degree. so as to intersect at an apex lying within the predetermined region of said specimen, individual particle detectors for each beam, and a particle optics lens system to focus each of the beams transmitted through the specimen onto a corresponding one of the particle detectors for separate detection of each beam, the lens system having at least one particle optics lens with an annular apertured pole structure to produce for each beam a deflecting field limited to a respective radial and circumferential area of the pole structure.
REFERENCES:
patent: 2464419 (1949-03-01), Smith
patent: 3100262 (1963-08-01), Welska
patent: 3576438 (1971-04-01), Pease
patent: 3749964 (1973-07-01), Hirata
patent: 3908124 (1975-09-01), Rose
Anderson Bruce C.
Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.v.
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