Transmission electron microscopy sample preparation method...

Details Transmission electron microscopy sample preparation method... Transmission electron microscopy sample preparation method...

2007-05-08

2007-05-08

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S311000, C250S397000, C250S458100, C250S309000, C438S014000, C438S197000, C438S098000

Reexamination Certificate

active

10711690

ABSTRACT:
A method for preparing a transmission electron microscopy (TEM) sample for electron holography includes forming a sacrificial material over an area of interest on the sample, and polishing the sample to a desired thickness, wherein the area of interest is protected from rounding during the polishing. The sacrificial material is removed from the sample following the polishing.

REFERENCES:
patent: 6218663 (2001-04-01), Nisch et al.
patent: 6759656 (2004-07-01), Tomita
K. Heinz et al.; “Holographic Low-Energy Electron Diffraction;” Journal of Physics: Condensed Matter 13 (2001); pp. 10647-10663.
Electron Holography: A New View of Material Structure, [online]; [retrieved on Jul. 22, 2004]; retrieved from the Internet at www.oml.gov/info/omlreview/rev28-4/text/electron.htm.
M-Bond 610 Adhesive System, [online]; [retrieved on Jul. 26, 2004]; retrieved from the Internet at www.2.spi.com/catalog/spec—prep/glue.shtml.

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