Transmission electron microscope having energy filter

Details Transmission electron microscope having energy filter Transmission electron microscope having energy filter

1998-10-16

2000-10-31

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250305, 250396ML, H01J 4000, H01J 4700, H01J 37141

Patent

active

061406457

ABSTRACT:
There is disclosed a small-sized and inexpensive electron spectroscopic imaging (ESI) system using an .OMEGA.-filter. The amounts of currents supplied to the lenses located before and after the .OMEGA.-filter need not be varied, whether the .OMEGA.-filter is used or not. The .OMEGA.-filter has an entrance window and an exit window. A straight path is formed between these two windows. A coil in an objective lens is located above a specimen. An entrance aperture is positioned close to the back focal plane of the objective lens. The objective lens is so energized that an electron microscope image is focused at the center of the filter on the straight path. The first stage of imaging lens is so energized that an image at the position P is an object plane. This image is magnified and focused onto a fluorescent screen by the following stages of imaging lenses.

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patent: 5448063 (1995-09-01), De Jong et al.
patent: 5585630 (1996-12-01), Taniguchi et al.
patent: 6040576 (2000-03-01), Benner
"Design and testing of Omega mode imaging energy filters at 200 kV", K. Tsuno et al., Journal of Electron Microscopy, 46(5), pp. 357-368 (1997).

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