Transmission electron microscope environmental specimen holder

Details Transmission electron microscope environmental specimen holder Transmission electron microscope environmental specimen holder

1993-05-17

1994-07-05

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

25044111, 2504922, H01J 37295, H01J 3730

Patent

active

053269713

ABSTRACT:
An environmental chamber for a transmission electron microscope, in which a specimen is held in position within the transmission electron microscope so an electron beam passes through the specimen to a detector. A removable sleeve surrounds the specimen holder and is sealed at both ends by a seal between the removable sleeve and the specimen holder to form a differential pressure chamber. Apertures are formed in the removable sleeve allowing the electron beam to pass through the specimen to the detector. A vacuum line allows gases to be removed from the differential chamber. A reactive inlet line extends into the differential chamber to allow a material to be introduced onto the specimen.

REFERENCES:
patent: 3206598 (1965-09-01), Wegmann
patent: 4463257 (1984-07-01), Simpkims et al.
patent: 4950901 (1990-08-01), Jones et al.
patent: 4996433 (1991-02-01), Jones et al.
patent: 5113072 (1992-05-01), Yamaguchi et al.
patent: 5229607 (1993-07-01), Matsui et al.

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