Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1998-06-18
1999-12-07
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250397, H01J 3726, H01J 37244
Patent
active
059987901
ABSTRACT:
In order to improve the performance of a CCD camera on a high voltage electron microscope, an electron decelerator is inserted between the microscope column and the CCD. This arrangement optimizes the interaction of the electron beam with the scintillator of the CCD camera while retaining optimization of the microscope optics and of the interaction of the beam with the specimen. Changing the electron beam energy between the specimen and camera allows both to be optimized.
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Berman Jack I.
Sartorio Henry P.
The Regents of the University of California
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