Transmission electron microscope CCD camera

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

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250397, H01J 3726, H01J 37244

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active

059987901

ABSTRACT:
In order to improve the performance of a CCD camera on a high voltage electron microscope, an electron decelerator is inserted between the microscope column and the CCD. This arrangement optimizes the interaction of the electron beam with the scintillator of the CCD camera while retaining optimization of the microscope optics and of the interaction of the beam with the specimen. Changing the electron beam energy between the specimen and camera allows both to be optimized.

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patent: 5717207 (1998-02-01), Koguchi et al.
Daberkow et al. Development and Performance of a Fast Fibre-Plate Coupled CCD Camera at Medium Energy and Image Processing System for Electron Holography, Ultramicroscopy 1996, V.64, pp. 35-48, Elsevier Science.
Deruijter et al., Imaging Properties and Applications of Slow-Scan Charge-Coupled Device Cameras Suitable for Electron Microscopy, Micron, 1995, v. 26, pp.247-275 Elsevier Science Ltd., Graet Britain.
Faruqi et al.,A High Sensitivity Imaging Detector for Electron Microscopy, Nuclear Instruments and Methods in Physics Research A, 1995, v. 367, pp. 408-412, Elsevier.
National Electrostatics Corp., Large High Gradient Accelerating Tube, 1995, Nov. Brochure, 4 pages, NEC, USA.
Sherman et al., Performance of a Slow-Scan CCD Camera for Macromolecular Imaging in a 400 KV Electron Cryomicroscope, Micron, v. 27, pp. 129-139, 1996, No.2, Elsevier.
Van Zwet et al., Measurement of the Modulation Transfer Function of a Slow-Scan CCD Camera on a TEM Using a Thin Amorphous Film as a Test Signal, Ultramicroscopy, 1996, v.64, pp. 49-55, Elsevier Science.
Weickenmeir et al., Quantitative Characterization of Point Spread Function and Detection Quantum Efficiency for a YAG Scintillator Slow Scan CCD Camera, Optik, 1995 v.99, No. 4, pp. 147-154, Stuttgart, Germany.

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