Transmission electron microscope and three-dimensional...

Details Transmission electron microscope and three-dimensional... Transmission electron microscope and three-dimensional...

2006-03-14

2006-03-14

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000

Reexamination Certificate

active

07012253

ABSTRACT:
An electron beam is emitted from an electron beam source, and deflected at different directions with a deflection plate to form a first electron beam E1and a second electron beam E2.The first electron beam E1is incident onto a given portion of a sample at an angle of θ1, and the second electron beam E2is incident onto the same portion of the sample at an angle of θ2. A first image and a second image of the portion of the sample by the first electron beam E1and the second electron beam E2are combined at a three-dimensional displaying device to display the portion of the sample three-dimensionally.

REFERENCES:
patent: 4097739 (1978-06-01), Muller et al.
patent: 5576543 (1996-11-01), Dingley
patent: B 49-22576 (1974-06-01), None
patent: A 1-264151 (1989-10-01), None
patent: A 3-246861 (1991-11-01), None

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