Transmission electron microscope and method of observing magneti

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

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253307, H01J 37295

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054364493

ABSTRACT:
When observing a magnetization image on a magnetic thin film by means of a scanning transmission electron microscope, the effect of a stray magnetic field is made smaller than that of a magnetization in order to produce a clear magnetic structure of the magnetization image. To relatively reduce the effect of the stray magnetic field in comparison to that of the magnetization, the scanning transmission electron microscope is equipped with a specimen-holder driving means which can rotate the surface of a specimen 5 by more than 90 degrees with an axis parallel to the optical path of an electron beam 1 taken as a center and incline the surface of the specimen 5 around a center axis 22 perpendicular to an axis 24 rotated earlier over the surface of the specimen 5 with respect to a magnetic-recording track direction and also perpendicular to the axis parallel to the optical path of the electron beam 1. In the actual observation, however, a limit is put on the angle of rotation by which the surface of the specimen 5 is rotated with respect to the recording track direction.

REFERENCES:
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patent: 4596934 (1986-06-01), Yanaka et al.
patent: 5004918 (1991-04-01), Tsuno et al.
patent: 5153434 (1992-10-01), Yajima et al.
Journal of Applied Physics, vol. 69, No. 8, Apr. 1991, "Mapping Induction Distributions by Transmission Electron Microscopy", Chapman et al, pp. 6078-6083.

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