Transmission electron microscope and method of observing element

Details Transmission electron microscope and method of observing element Transmission electron microscope and method of observing element

1995-12-12

1996-11-26

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250305, H01J 37153

Patent

active

055788238

ABSTRACT:
A transmission electron microscope system equipped with an energy filter and capable of displaying a two-dimensional distribution map of element of concern on a real time basis. A transmission electron microscope incorporating an energy filer is equipped with a television camera for recording two types of energy-loss images in separate frame memories, respectively. For effecting background processing for image data, intensity of an image to be stored in one frame memory is attenuated with a constant ratio by an intensity regulating mechanism. A signal indicative of difference between the image data stored in the respective frame memories is outputted to a monitor as a picture signal.

REFERENCES:
patent: 4789780 (1988-12-01), Le Poole et al.
patent: 4812652 (1989-03-01), Egle et al.
patent: 5097126 (1992-03-01), Krivanek
Proc. 50th Meeting of Japan Society of Electron Microscope, 1994, p. 76.
Electron Micros, vol. 44, No. 2, 1995, pp. 86-90, Joji Kimoto et al.: Elemental Mapping Using a Field Emission Transmission Electron Microscope with an Imaging Filter.
Proc. 51st Meeting of the Microscopy Society of America, 1993, pp. 586-587: O. L. Krivanek et al.: Elemental Mapping with an Energy-Selecting Imaging Filter.
JP. J. Appl. Phys., KvOL. 33 (1994) pp. 1 1642-1 1644, 15 Nov. 1994, Joji Kimoto et al.: High LSpatial Resolution Elemental Mapping of Multi-layer Using a Field Emission Transmission Electron Microscope Equipped with an Imaging Filter.

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