Transmission electron microscope and method of observing element

Details Transmission electron microscope and method of observing element Transmission electron microscope and method of observing element

1998-02-25

1999-11-09

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250305, H01J 37153

Patent

active

059819480

ABSTRACT:
Letting core-loss energy of an objective element be E.sub.c, and width of the energy selection slit be .DELTA.E. Initially, a pre-edge image obtained by increasing an acceleration voltage of an electron gun by E.sub.c -.DELTA.E and a pre-pre-edge image obtained by increasing an acceleration voltage by E.sub.c -.DELTA.E are taken with the same exposure time, and an intensity ratio R of the pre-edge image to the pre-pre-edge image is calculated. Next, a post-edge image obtained by increasing an acceleration voltage by E.sub.c is taken with an exposure time t.sub.pre, and a pre-edge image is taken with an exposure time R.times.t.sub.pre. An element distribution image of the objective element can be obtained by simply performing image subtraction of the pre-edge image from the post-edge image in a computer.

REFERENCES:
patent: 5578823 (1996-11-01), Taniguchi
The Electron Microscope Society of Japan, the 50th Scientific Conference Proceeding (1994), p. 76.

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