Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2007-06-26
2007-06-26
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S310000, C250S306000, C250S309000, C250S392000, C250S3960ML, C250S397000, C250S398000, C250S440110, C250S442110
Reexamination Certificate
active
11245428
ABSTRACT:
Drift generated at the time of photographing a TEM image is corrected simultaneously with photographing, so that a TEM image free form influence of drift is photographed. While the TEM image is recorded, drift in the place out of the view field subjected to recording is measured from moment to moment by another TV camera or a position sensitive detector. Drift is corrected by the movement of the specimen due to a specimen holder or by the movement of the image due to an image shift coil.
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German Office Action Issued in corrresponding foreign application No. 102005048677.0-54, dated Dec. 8, 2006.
Otsuka Hisafumi
Taniguchi Yoshifumi
Hitachi High-Technologies Corporation
McDermott Will & Emery LLP
Souw Bernard
Wells Nikita
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