Transmission electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

Reexamination Certificate

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Details

C250S306000, C250S307000, C250S310000

Reexamination Certificate

active

07923686

ABSTRACT:
An apparatus which permits high-angle annular dark-field (HAADF) imaging comprises an electron gun, a specimen chamber in which a specimen is set, a gas cylinder for supplying environmental gas around the surface of the specimen through both a gas flow rate controller and a gas nozzle, a vacuum pump for evacuating the inside of the specimen chamber, an objective lens including upper and lower polepieces, a detector for detecting electrons transmitted through the specimen, a display device for displaying a transmission image of the specimen, orifice plates having minute holes, holders supporting the orifice plates, a drive mechanism for driving the holders, and a motion controller. The orifice plates can be moved in a direction crossing the optical axis of the beam on the upper and lower surfaces of the upper and lower polepieces of the objective lens.

REFERENCES:
patent: 6803570 (2004-10-01), Bryson et al.
patent: 7388211 (2008-06-01), Chao et al.
patent: 2008/0093565 (2008-04-01), Yaguchi et al.
patent: 2009/0045337 (2009-02-01), Kimura
patent: 2009/0256075 (2009-10-01), Kemen et al.
patent: 05-258701 (1993-10-01), None
patent: 08-329876 (1996-12-01), None
patent: 2002-134055 (2002-05-01), None
patent: 2007-066715 (2007-03-01), None

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