Transmission electron microscope

Details Transmission electron microscope Transmission electron microscope

1986-06-09

1988-10-04

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250396R, 250398, H01J 3726

Patent

active

047757906

ABSTRACT:
A transmission electron microscope for irradiating a sample with an electron beam and for causing an image formation lens system to enlarge the electron beam having passed through the sample so that a magnified image of the sample is formed by the electron beam. The image formation lens system includes a plurality of lens groups each having a plurality of electromagnetic lenses, and the focal length of each of the electromagnetic lenses included in at least one lens group is changed while keeping the resultant focal length of each lens group constant, to rotate the magnified image in a state that the magnification of the image is kept constant.

REFERENCES:
patent: 4494000 (1985-01-01), Shii et al.
patent: 4520264 (1985-05-01), Tsuno et al.
patent: 4626689 (1986-12-01), Tomita et al.

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