Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1989-11-28
1991-03-19
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250306, H01J 3726
Patent
active
050013459
ABSTRACT:
A transmission electron microscope including an input portion such as a keyboard, a central processing unit (CPU), two memories connected with the CPU, an imaging lens system, and a lens control portion connected with the CPU. The imaging lens system comprises an objective lens, intermediate lenses, and a projector lens. The microscope can operate either in image mode or in diffraction mode. In the image mode, excitation currents fed to the lenses can be controlled to rotate the image projected onto the fluorescent screen. In the diffraction mode, the excitation currents are controlled according to data about the orientation of the image so that the projected diffraction pattern may substantially coincide in orientation with the image.
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patent: 3225192 (1965-12-01), Katagiri et al.
patent: 3571590 (1971-03-01), Katagiri et al.
patent: 4520264 (1985-05-01), Tsuno et al.
patent: 4775790 (1988-10-01), Kobayashi et al.
Anderson Bruce C.
Jeol Ltd.
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