Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1992-08-27
1994-09-27
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
H01J 3726
Patent
active
053509188
ABSTRACT:
In a transmission electron microscope, an electron beam from an electron gun is irradiated on a specimen by an illuminating lens system and a transmission image of the specimen is formed on a photographic film by an image forming lens system. The transmission image is picked up by a TV camera and displayed on a television display screen and a view field range of recording image with the photographic film is manifested on the display screen.
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patent: 4206349 (1980-06-01), Kamimura
patent: 4724319 (1988-02-01), Shirota
patent: 5013915 (1991-05-01), Isakozawa et al.
patent: 5117112 (1992-05-01), Ito
Kobayashi Hiroyuki
Kubozoe Morioki
Terakado Sadao
Anderson Bruce C.
Hitachi , Ltd.
Hitachi Science Systems Ltd.
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