Transmission electron microscope

Details Transmission electron microscope Transmission electron microscope

1998-08-28

2000-08-29

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

H01J 4900

Patent

active

061112534

ABSTRACT:
A transmission electron microscope that produces a monochromated electron beam and thus has improved spatial resolution. This microscope has a retarding monochromator mounted between the first anode (extraction electrode) of a field emission gun (FEG) and the second anode. The monochromator includes a decelerating portion, a Wien filter and an accelerating portion. An exit slit is so positioned that this exit slit and the object plane of the monochromator are symmetrical with respect to the center of the Wien filter. The beam extracted by the cathode of the gun is monochromated by the monochromator and so the chromatic aberrations can be improved. Consequently, the spatial resolution can be improved.

REFERENCES:
patent: 4153844 (1979-05-01), Kirschner
patent: 4742223 (1988-05-01), Kesmodel
"Performance of a new high-resolution electron energy-loss spectroscopy microscope", Masami Terauchi et al., Microsc. Microanal. Microstruct., 2 (1991) 351-358.

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