Transmission electron microscope

Details Transmission electron microscope Transmission electron microscope

1989-06-15

1990-10-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250396ML, 250396R, H01J 3726

Patent

active

049637371

ABSTRACT:
There is disclosed an electron microscope having an auxiliary lens inserted between the final-stage focusing lens and a set of objective lenses. The microscope is further equipped with a circuit which varies the intensity of the auxiliary lens so as to fix the position of a crossover image irrespective of the intensity of the final-stage focusing lens. The crossover image is created between the auxiliary lens and the set of objective lenses by the auxiliary lens. An aperture plate having an objective aperture is disposed at the fixed position of the crossover image.

REFERENCES:
patent: 3715582 (1973-02-01), Akahori et al.
patent: 4306149 (1981-12-01), Lepoole
patent: 4429222 (1984-01-01), Yomezawa
patent: 4626689 (1986-12-01), Tomita et al.
patent: 4633085 (1986-12-01), Tomita et al.

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