Transmission electron microscope

Details Transmission electron microscope Transmission electron microscope

1990-07-02

1991-04-02

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, 250310, H01J 3726

Patent

active

050049194

ABSTRACT:
A transmission electron microscope capable of operating in photoelectron emission microscopy mode as well as in transmission electron microscopy mode. A negative voltage is applied to a specimen placed between the magnetic pole pieces of the objective lens. In the photoelectron emission microscopy mode, the specimen is irradiated with exciting rays to induce photoelectrons from the rear surface of the specimen. The exciting rays can be soft x-rays or ultraviolet rays produced from a high-pressure mercury lamp. The soft x-rays can be produced by directing the electron beam emitted from the electron gun of the microscope either onto the specimen or onto one or more targets placed over the specimen.

REFERENCES:
patent: 2440640 (1948-04-01), Marton
patent: 4096386 (1978-06-01), Rempfr et al.
"An Analytical Reflection and Emission UHV Surface Electron Microscope", W. Telieps and E. Bauer, Ultramicroscopy, vol. 17, pp. 57-66, 1985.

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