Transistor devices with nano-crystal gate structures

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S411000, C257S412000, C257SE29129

Reexamination Certificate

active

07928502

ABSTRACT:
Embodiments of non-volatile semiconductor devices include a substrate having therein a source region and a drain region separated by a channel region extending to a first surface of the substrate, and a multilayered gate structure containing nano-crystals located above the channel region. The gate structure comprises a gate dielectric substantially in contact with the channel region, spaced-apart nano-crystals disposed in the gate dielectric, one or more impurity blocking layers overlying the gate dielectric, and a gate conductor layer overlying the one more impurity blocking layers. The blocking layer nearest the gate conductor can be used to adjust the threshold voltage of the device and/or retard dopant out-diffusion from the gate conductor layer.

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