Transistor and semiconductor device having columnar crystals

Details Transistor and semiconductor device having columnar crystals Transistor and semiconductor device having columnar crystals

1998-03-13

2000-03-14

Tran, Minh Loan

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Non-single crystal, or recrystallized, material with...

257 66, 257255, 257627, 257628, H01L 2904

Patent

active

060376104

ABSTRACT:
A semiconductor device having high carrier mobility, which comprises a substrate provided thereon a base film and further thereon a crystalline non-single crystal silicon film by crystal growth, wherein, the crystals are grown along the crystallographic [110] axis, and source/drain regions are provided approximately along the direction of carrier movement which coincides to the direction of crystal growth. Moreover, the electric conductivity along this direction of crystal growth is higher than any in other directions.

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