Transfer robot and inspection method for thin substrate

Details Transfer robot and inspection method for thin substrate Transfer robot and inspection method for thin substrate

2005-08-09

2005-08-09

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

C438S716000, C414S935000, C414S936000, C414S937000, C414S938000, C414S940000, C029S025010

Reexamination Certificate

active

06927181

ABSTRACT:
A transfer robot (5) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (5), comprising an inspection camera (1) for detecting the stored state of the thin substrates (3) in a storage cassette (2), wherein the plurality of thin substrates (3) stored in the storage cassette (2) are carried out from the storage cassette (2) by the robot.

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patent: WO 00/02239 (2000-01-01), None

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