Transfer plate rotation system

Details Transfer plate rotation system Transfer plate rotation system

1984-05-17

1985-10-22

Metz, Andrew H.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

204192R, 414217, 414222, 118729, C23C 1500

Patent

active

045486999

ABSTRACT:
The system for rotating the transfer plate of a coating system in a vacuum chamber consists of a transfer plate driver assembly on the outside of the chamber at the axis and a transfer plate rotator assembly inside the chamber. The driver assembly consists of a pneumatic actuator for linear motion, a barrel cam which translates the linear motion into rotary motion with high torque at starting and stopping positions, and a rotary feedthrough all in a structural housing. The rotator assembly comprises a central hub with means for supporting the end walls, a transfer plate hub assembly and a ratchet arm connected to the rotary feedthrough. As the pressure plate assembly is drawn back by the ram, it in turn draws back the transfer plate and engages the ratchet arm with the transfer plate hub. The actuator then rotates the transfer plate. The ram then reverses direction, the ratchet arm disengages and is returned to its initial position.

REFERENCES:
patent: 3796649 (1974-03-01), Lamont, Jr. et al.
patent: 4274936 (1981-06-01), Love
patent: 4311427 (1982-01-01), Coad et al.
patent: 4416759 (1983-11-01), Harra et al.

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