4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

George Coad

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Edge handling wafer chuck

Chucks or sockets – Pivoted jaw
Reexamination Certificate

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Edge handling wafer chuck

Chucks or sockets – Pivoted jaw
Reexamination Certificate

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Transfer plate rotation system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-247365

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