Transfer of optical element patterns on a same side of a...

Details Transfer of optical element patterns on a same side of a... Transfer of optical element patterns on a same side of a...

2005-03-22

2005-03-22

McPherson, John A. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C216S024000, C216S026000

Reexamination Certificate

active

06869754

ABSTRACT:
A passive optical element is transferred into a substrate already having features with a vertical dimension thereon. The features may be another passive optical element, an active optical element, a dichroic layer, a dielectric layer, alignment features, metal portions. A protective layer is provided over the feature during the transfer of the optical element. One or more of these processes may be performed on a wafer level.

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