Material or article handling – Apparatus for charging a load holding or supporting element... – Means to convey load back and forth between initial location...
Reexamination Certificate
2006-03-21
2011-10-11
McDonald, Rodney (Department: 1795)
Material or article handling
Apparatus for charging a load holding or supporting element...
Means to convey load back and forth between initial location...
C414S217000, C414S805000, C414S806000, C118S719000, C204S298250
Reexamination Certificate
active
08033772
ABSTRACT:
A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate between the processing chamber and the load lock chamber. A lid couples to and seals a top of the main body of the transfer chamber. The transfer chamber also has a domed bottom adapted to couple to and to seal a bottom portion of the main body of the transfer chamber.
REFERENCES:
patent: 1381877 (1921-06-01), Ickes
patent: 2761582 (1956-09-01), Moore
patent: 3854443 (1974-12-01), Baerg
patent: 3925679 (1975-12-01), Berman et al.
patent: 4341592 (1982-07-01), Shortes
patent: 4455177 (1984-06-01), Filippov et al.
patent: 4474358 (1984-10-01), Bennett
patent: 4483654 (1984-11-01), Koch et al.
patent: 4491520 (1985-01-01), Jaye
patent: 4632624 (1986-12-01), Mirkovich et al.
patent: 4643627 (1987-02-01), Bednorz et al.
patent: 4649612 (1987-03-01), Sakamaki et al.
patent: 4695215 (1987-09-01), Jacoby et al.
patent: 4709655 (1987-12-01), Van Mastrigt
patent: 4726924 (1988-02-01), Mittelstadt
patent: 4763690 (1988-08-01), Martin
patent: 4790750 (1988-12-01), Bourel et al.
patent: 4799418 (1989-01-01), Takahashi
patent: 4851018 (1989-07-01), Lazzari et al.
patent: 4851058 (1989-07-01), Lazari
patent: 4851101 (1989-07-01), Hutchinson
patent: 4917556 (1990-04-01), Stark et al.
patent: 4952299 (1990-08-01), Chrisos et al.
patent: 4993358 (1991-02-01), Mahawili
patent: 5002464 (1991-03-01), Lee
patent: 5085887 (1992-02-01), Adams et al.
patent: 5138525 (1992-08-01), Rodriguez
patent: 5152504 (1992-10-01), Nixon
patent: 5186718 (1993-02-01), Tepman et al.
patent: 5268034 (1993-12-01), Vukelic
patent: 5269598 (1993-12-01), Liu
patent: 5417537 (1995-05-01), Miller
patent: 5421957 (1995-06-01), Carlson et al.
patent: 5503809 (1996-04-01), Coate
patent: 5522412 (1996-06-01), Ohba et al.
patent: 5567243 (1996-10-01), Foster
patent: 5647911 (1997-07-01), Vanell
patent: 5730801 (1998-03-01), Tepman et al.
patent: 5766364 (1998-06-01), Ishida
patent: 5877086 (1999-03-01), Aruga
patent: 5934856 (1999-08-01), Asakawa et al.
patent: 6019839 (2000-02-01), Achutharaman et al.
patent: 6045620 (2000-04-01), Tepman et al.
patent: 6093252 (2000-07-01), Wengert et al.
patent: 6099697 (2000-08-01), Hausmann
patent: 6143079 (2000-11-01), Halpin
patent: 6148765 (2000-11-01), Lilleland
patent: 6190104 (2001-02-01), Ikeda et al.
patent: 6201999 (2001-03-01), Jevtic
patent: 6216328 (2001-04-01), Boyd et al.
patent: 6257827 (2001-07-01), Hendrickson et al.
patent: 6267545 (2001-07-01), Mooring et al.
patent: 6267917 (2001-07-01), Guzikowski et al.
patent: 6286451 (2001-09-01), Ishikawa et al.
patent: 6305565 (2001-10-01), Boyd et al.
patent: 6326597 (2001-12-01), Lubomirsky et al.
patent: 6383330 (2002-05-01), Raaijmakers
patent: 6390019 (2002-05-01), Grimbergen et al.
patent: 6440261 (2002-08-01), Tepman et al.
patent: 6464792 (2002-10-01), Wengert et al.
patent: 6477980 (2002-11-01), White
patent: 6503365 (2003-01-01), Kim et al.
patent: 6517304 (2003-02-01), Matsumoto
patent: 6530732 (2003-03-01), Theriault et al.
patent: 6538388 (2003-03-01), Nakano et al.
patent: 6540869 (2003-04-01), Saeki et al.
patent: 6634845 (2003-10-01), Komino
patent: 6659111 (2003-12-01), Mouri et al.
patent: 6663333 (2003-12-01), Kinnard et al.
patent: 6691876 (2004-02-01), Tsai et al.
patent: 6698991 (2004-03-01), Bachrach et al.
patent: 6719517 (2004-04-01), Beaulieu
patent: 6736149 (2004-05-01), Biberger et al.
patent: 6818067 (2004-11-01), Doering et al.
patent: 6869485 (2005-03-01), Halpin
patent: 6926798 (2005-08-01), Biberger et al.
patent: 6950721 (2005-09-01), Tashiro et al.
patent: 6977014 (2005-12-01), Stevens et al.
patent: 7018517 (2006-03-01), Kurita et al.
patent: 7060422 (2006-06-01), Biberger et al.
patent: 7282460 (2007-10-01), Jang
patent: 7313262 (2007-12-01), Lin et al.
patent: 7375041 (2008-05-01), Jang
patent: 2001/0012681 (2001-08-01), Wensel
patent: 2001/0016364 (2001-08-01), Loan et al.
patent: 2001/0029892 (2001-10-01), Cook et al.
patent: 2001/0036393 (2001-11-01), Kroeker
patent: 2001/0041122 (2001-11-01), Kroeker
patent: 2001/0042414 (2001-11-01), Hunter
patent: 2002/0000198 (2002-01-01), Ishikawa et al.
patent: 2002/0033232 (2002-03-01), Raaijmakers
patent: 2003/0012624 (2003-01-01), Kinnard
patent: 2003/0035709 (2003-02-01), Cox et al.
patent: 2003/0109094 (2003-06-01), Seidel et al.
patent: 2004/0003777 (2004-01-01), Carpenter et al.
patent: 2004/0076505 (2004-04-01), Kinnard et al.
patent: 2004/0200415 (2004-10-01), Maegawa et al.
patent: 2004/0221811 (2004-11-01), Mitchell et al.
patent: 2004/0240971 (2004-12-01), Tezuka et al.
patent: 2004/0240983 (2004-12-01), Jang
patent: 2005/0005849 (2005-01-01), Masuoka
patent: 2005/0095088 (2005-05-01), Kurita et al.
patent: 2005/0133160 (2005-06-01), Kennedy et al.
patent: 2005/0205012 (2005-09-01), Jang
patent: 2006/0051507 (2006-03-01), Kurita et al.
patent: 2006/0054280 (2006-03-01), Jang
patent: 2006/0060138 (2006-03-01), Keller
patent: 2006/0101728 (2006-05-01), White
patent: 2006/0182529 (2006-08-01), Hiroki
patent: 2006/0201074 (2006-09-01), Kurita
patent: 2006/0263177 (2006-11-01), Van der Meulen
patent: 2007/0020890 (2007-01-01), Thakur et al.
patent: 2007/0141748 (2007-06-01), Rice
patent: 2007/0166133 (2007-07-01), Lee et al.
patent: 2007/0183869 (2007-08-01), Cho et al.
patent: 2008/0025821 (2008-01-01), White et al.
patent: 1573481 (2005-02-01), None
patent: 1574232 (2005-02-01), None
patent: 100421212 (2008-09-01), None
patent: 0 219 826 (1987-04-01), None
patent: 0 866 146 (1998-09-01), None
patent: 0 928 014 (1999-07-01), None
patent: 1 065 701 (2001-01-01), None
patent: 1693880 (2006-08-01), None
patent: 1 029 109 (2007-09-01), None
patent: 0 902 960 (2010-04-01), None
patent: 03-019318 (1991-01-01), None
patent: 5-347130 (1993-12-01), None
patent: 07-012976 (1995-01-01), None
patent: 8064542 (1996-03-01), None
patent: 08-152493 (1996-06-01), None
patent: 08-236411 (1996-09-01), None
patent: 10-106911 (1998-04-01), None
patent: 11-089026 (1999-03-01), None
patent: 11-089027 (1999-03-01), None
patent: 11-510562 (1999-09-01), None
patent: 11-285857 (1999-10-01), None
patent: 2000-167788 (2000-06-01), None
patent: 2000-514601 (2000-10-01), None
patent: 2000-345349 (2000-12-01), None
patent: 2001-298010 (2001-10-01), None
patent: 2002-001100 (2002-01-01), None
patent: 2002076091 (2002-03-01), None
patent: 2002158090 (2002-05-01), None
patent: 2003117655 (2003-04-01), None
patent: 2004241547 (2004-08-01), None
patent: 2004-335743 (2004-11-01), None
patent: 2004-363601 (2004-12-01), None
patent: 2006114874 (2006-04-01), None
patent: 2007-073542 (2007-03-01), None
patent: 2000-0032767 (2000-06-01), None
patent: 2002-0017892 (2002-03-01), None
patent: 10-2003-0035350 (2003-06-01), None
patent: 2003-0066118 (2003-08-01), None
patent: 2003-0077803 (2003-10-01), None
patent: 10-0441875 (2004-07-01), None
patent: 10-2004-0090496 (2004-10-01), None
patent: 2005-0113574 (2005-12-01), None
patent: 2006-0015023 (2006-02-01), None
patent: 2006-0049499 (2006-05-01), None
patent: 2006-0092886 (2006-08-01), None
patent: 10-0737228 (2007-07-01), None
patent: 10-0769152 (2007-10-01), None
patent: 0406285 (2000-09-01), None
patent: 0408421 (2000-10-01), None
patent: 0409421 (2000-10-01), None
patent: 0471017 (2002-01-01), None
patent: 0504732 (2002-10-01), None
patent: 0541580 (2003-07-01), None
patent: 0567574 (2003-12-01), None
patent: 2004-28495 (2004-12-01), None
patent: I249186 (2006-02-01), None
patent: WO 97/06288 (1997-02-01), None
patent: WO 00/00999 (2000-01-01), None
patent: WO 04/001817 (2003-12-01), None
patent: WO 2006/130811 (2006-12-01), None
ISR and WO of PCT/US03/19413 dated Oct. 20, 2003.
EPO Office Action of 03 739 220.6-2119 dated Jul. 30, 2008.
South Korean Office Action of 10-2004-7020838 dated May 17, 2006.
IPER and WO of PCT/US03/19413 dated Apr. 6, 2005.
Chinese Office Action of 03819559.3 dated Nov. 24, 2006.
Taiwan Application No. 092116901 Office Action dated Aug. 13, 2007.
C
Beer Emanuel
Blonigan Wendell T.
Kurita Shinichi
Nguyen Hung T.
Applied Materials Inc.
Dugan & Dugan PC
McDonald Rodney
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