Transfer chamber for cluster system

Details Transfer chamber for cluster system Transfer chamber for cluster system

2008-05-20

2008-05-20

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Miscellaneous

C414S217000, C414S220000

Reexamination Certificate

active

11135727

ABSTRACT:
A transfer chamber for a cluster system includes a first body, a second body attached at one side of the first body, and a cover combined with an upper portion of the first body. The transfer chamber further includes a third body at another side of the first body, wherein the third body has the same shape as the second body.

REFERENCES:
patent: 6045620 (2000-04-01), Tepman et al.
patent: 6056849 (2000-05-01), Straemke
patent: 6405423 (2002-06-01), Donde
patent: 6977014 (2005-12-01), Stevens et al.
patent: 2002/0005168 (2002-01-01), Kraus et al.
patent: 2004/0240983 (2004-12-01), Jang
patent: 2006/0051507 (2006-03-01), Kurita et al.
patent: 2006/0101728 (2006-05-01), White et al.
patent: 1020040090496 (2004-10-01), None

Affiliated with

Also associated with

Rating

Transfer chamber for cluster system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Transfer chamber for cluster system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Transfer chamber for cluster system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3932959