Transfer chamber for cluster system

Details Transfer chamber for cluster system Transfer chamber for cluster system

2007-10-16

2007-10-16

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Miscellaneous

C414S217000, C414S220000, C034S287000

Reexamination Certificate

active

10859893

ABSTRACT:
A transfer chamber for a cluster system includes a first body, a second body attached at one side of the first body, and a cover combined with an upper portion of the first body. The transfer chamber further includes a third body at another side of the first body, wherein the third body has the same shape as the second body.

REFERENCES:
patent: 6045620 (2000-04-01), Tepman et al.
patent: 6056849 (2000-05-01), Straemke
patent: 6405423 (2002-06-01), Donde
patent: 6977014 (2005-12-01), Stevens et al.
patent: 2002/0005168 (2002-01-01), Kraus et al.
patent: 2006/0051507 (2006-03-01), Kurita et al.
patent: 2006/0101728 (2006-05-01), White et al.
patent: 1020040090496 (2004-10-01), None

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