Transducer isolation in surface acoustic wave processor

Details Transducer isolation in surface acoustic wave processor Transducer isolation in surface acoustic wave processor

1982-05-07

1983-09-06

Miller, J. D.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313R, 333151, H03H 925

Patent

active

044031653

ABSTRACT:
The invention is an improved manufacturing technique for producing a certain class of Surface Acoustic Wave (SAW) devices, namely those having input and output transducers in close proximity. A much higher manufacturing yield results from eliminating the cutting of a slot in the substrate between input and output transducers as formerly done. This frequently destructive step is replaced by ion-milling of a deep groove between the ports and backfilling with a metal of proper configuration to provide electromagnetic shielding. The technique produces a new device that is at least equal to the prior art in rejection of unwanted couplings between input and output.

REFERENCES:
patent: 3576453 (1971-04-01), Mason
patent: 4004254 (1977-01-01), DeVries
Gerard, H. M. et al., 500 MHz Bandwidth RAC Filter with Constant Groove Dh, IEEE Ultrasonics Symposium, 1978, pp. 734-737.
Brady, M. J. et al., "Generation of Hi-Frequency SAWS on Piezoelectric Wafers", IBM Disclosure Bulletin, v15, No. 10, Mar. '73.

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