Torsion type probe and scanning probe microscope using the same

Details Torsion type probe and scanning probe microscope using the same Torsion type probe and scanning probe microscope using the same

1998-03-31

2000-08-08

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 25044211, 73105, H01J 3700, G01N 1310, G01B 528

Patent

active

06100524&

ABSTRACT:
A torsion type probe for scanning probe microscopes, especially for atomic force microscopes, includes a supporting block, a torsion beam device arranged on the supporting block, a thin-film plane plate rotatably supported by the torsion beam means, and a tip formed on the thin-film plane plate. The torsion beam device include a piezoresistor, which is preferably formed in the surface or lateral walls of the torsion beam device, to detect torsion of the torsion beam device as the probe scans the surface of a sample.

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