Torque-based end point detection methods for chemical...

Details Torque-based end point detection methods for chemical... Torque-based end point detection methods for chemical...

2006-05-09

2006-05-09

Nguyen, Dung Van (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S005000, C451S041000

Reexamination Certificate

active

07040958

ABSTRACT:
A chemical mechanical polishing (CMP) method is disclosed in which a torque-based end-point algorithm is used to determine when polishing should be stopped. The end-point algorithm is applicable to situations where a ceria (CeO2) based CMP slurry is used for further polishing, pre-patterned and pre-polished workpieces (e.g., semiconductor wafers) which have a high friction over-layer (e.g., HDP-oxide) and a comparatively, lower friction and underlying layer of sacrificial pads (e.g., silicon nitride pads). A mass production wise, reliable and consistent signature point in the friction versus time waveform of a torque-representing signal is found and used to trigger an empirically specified duration of overpolish. A database may be used to define the overpolish time as a function of one or more relevant parameters.

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