Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1990-02-15
1992-05-26
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
360122, 360123, 360126, 29603, G03F 736, G11B 5187
Patent
active
051167190
ABSTRACT:
A thin film magnetic read/write head is manufactured using an improved pole tip alignment process. The upper pole tip is formed with positively sloped profile sides for improved alignment between the profile sides of the top pole and the profile sides of the protective layer used during an ion milling alignment process.
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"The Effect of Sensitizer Chemistry on Decarboxylation-Type Image Reversal Systems" by Grunwald et al. published in SPIE vol. 1086, Advances in Resist Technology and Processing VI (1989), pp. 129-137.
McCamish Marion E.
Rodee Christopher D.
Seagate Technology Inc.
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