Top pole profile for pole tip trimming

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

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360122, 360123, 360126, 29603, G03F 736, G11B 5187

Patent

active

051167190

ABSTRACT:
A thin film magnetic read/write head is manufactured using an improved pole tip alignment process. The upper pole tip is formed with positively sloped profile sides for improved alignment between the profile sides of the top pole and the profile sides of the protective layer used during an ion milling alignment process.

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patent: 4985985 (1991-01-01), Das
"The Effect of Sensitizer Chemistry on Decarboxylation-Type Image Reversal Systems" by Grunwald et al. published in SPIE vol. 1086, Advances in Resist Technology and Processing VI (1989), pp. 129-137.

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