Top-entry transmission electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports

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250311, G21K 506

Patent

active

041707370

ABSTRACT:
A top-entry transmission electron microscope comprises a stage with a changeable cartridge which houses a specimen holder spaced in the magnetic lens field and tiltable about the axis x perpendicular to the microscope optical axis. An executive step motor of the specimen holder's electric drive is mounted on the stage and has a rotor mechanically coupled with the specimen holder for the rotor and holder to be turned synchronously. The microscope comprises also a rocker pivotally mounted in the changeable cartridge and designed to convey the drive to the rotor via a drive transmitting member; a rotor-turning piezoelectrically actuated electro-mechanical means and a rocker-positioning piezoelectrically actuated electromechanical means which are connected, respectively, to a control voltage shaper of the step motor and to a unit for settling the magnitude and sence of specimen holder displacement. The disclosed microscope features a lower level of drift of the tiltable specimen holder, widened up to 360.degree. range of specimen tilt angles, and a greater speed of obtaining stereopair micrograpgs.

REFERENCES:
patent: 3230365 (1966-01-01), Nagahama
patent: 3240934 (1966-03-01), Watanabe et al.
patent: 3308294 (1967-03-01), Ozasa
patent: 3714423 (1973-01-01), Lucas
patent: 3952203 (1976-04-01), Hoppe
patent: 4058731 (1977-11-01), Muller et al.
"A High-Angle Tilting Stage for the 650 Ku Hitachi Electron Microscope," Bouchard et al., Rev. of Scien. Ins., No. 4, vol. 44, Apr. 1973, pp. 511-512.

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