Top anti-reflective coating polymer, its preparation method...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

Reexamination Certificate

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Details

C525S276000, C525S243000, C525S259000, C430S326000, C430S273100

Reexamination Certificate

active

07381519

ABSTRACT:
Disclosed herein is a top anti-reflective coating polymer and its composition comprising the same represented by Formula 1 below:wherein R1and R2are independently, hydrogen, methyl or fluoromethyl; R3and R4are independently, a C1-10hydrocarbon or a C1-10hydrocarbon in which the hydrogen atoms are wholly or partly replaced by fluorine atoms; and a, b, c, d and e represent the mole fraction of each monomer and are in the range between about 0.05 and about 0.9, such that the sum of a, b, c, d, and e equals one.

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STN Database search in Registry file for PGMEA, run Jan. 31, 2008, 6 pages , from STN Columbus.

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