Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
Reexamination Certificate
2007-09-28
2009-12-08
Nghiem, Michael P (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Statistical measurement
Reexamination Certificate
active
07630858
ABSTRACT:
A plurality of tool identifiers, a plurality of information types, and a plurality of report types are displayed in a first user interface of a tool health reporting system. A user selection of a distinct report type from the plurality of report types, a distinct information type from the plurality of information types, and a distinct tool identifier from the plurality of tool identifiers are received. A report is displayed in a second user interface of the tool health reporting system, the report including data associated with the distinct information type, the distinct report type and the distinct tool identifier, wherein the report correlates equipment based measurement data to product level measurement data.
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Soens Stefan
Weiher-Telford Susan
Applied Materials Inc.
Blakely & Sokoloff, Taylor & Zafman
Nghiem Michael P
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