Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
Reexamination Certificate
2006-03-15
2008-11-18
Nghiem, Michael P (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Statistical measurement
Reexamination Certificate
active
07454312
ABSTRACT:
A computer-implemented method, system and computer program device are provided for monitoring production of semiconductor products to detect potential defect excursions. Equipment based data is collected reflecting equipment performance for a plurality of semiconductor manufacturing tools used for processing a plurality of semiconductor products. Also, product level data is collected reflecting product quality for the plurality of semiconductor products processed on the plurality of manufacturing tools. At least a portion of the product level data and at least a portion of the equipment based data are then correlated. At least one report is generated of the correlation of data.
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Soens Stefan
Weiher Susan
Applied Materials Inc.
Blakely , Sokoloff, Taylor & Zafman LLP
Nghiem Michael P
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