Titanium nitride as one layer of a multi-layered coating intende

Details Titanium nitride as one layer of a multi-layered coating intende Titanium nitride as one layer of a multi-layered coating intende

1979-07-05

1980-10-07

Cannon, James C.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

156652, 156656, 1566591, 1566611, 174 685, 204192C, 427 34, 427 96, 427 99, 427125, 427423, 4274197, 428432, 428450, 428472, 428623, 428627, 428670, 428672, 428931, 430316, 430318, B05D 512, B32B 700, B23C 1500, C23F 102

Patent

active

042269326

ABSTRACT:
A multilayered thin film structure comprising layers of resistive and conductive materials on a substrate, said layers including tantalum nitride, palladium and gold. A layer of titanium nitride, is used between the tantalum nitride and palladium layers to act as an adhesive layer, to prevent undercutting during etching, and to allow all metal depositing to be performed during one step.

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