Tin oxide CCD imager

Details Tin oxide CCD imager Tin oxide CCD imager

1986-11-26

1989-02-21

Macon, Robert S.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 35821311, 437 53, H01L 2978

Patent

active

048070041

ABSTRACT:
A novel process for fabricating a CCD imager arrray (10) having a tin oxide electrode monolayer (18) is disclosed. The process includes a low pressure chemical vapor deposition step using tetramethyltin and oxygen, and an ion implantation step that increased conductivity of the tin oxide electrodes to as high as 700 ohm.sup.-1 cm.sup.-1.

REFERENCES:
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patent: 3757733 (1973-09-01), Reinberg
patent: 4024563 (1977-05-01), Tasch, Jr.
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patent: 4140814 (1979-02-01), Hynecek
patent: 4229752 (1980-10-01), Hynecek
patent: 4242694 (1980-12-01), Koike et al.
patent: 4280141 (1981-07-01), McCann et al.
patent: 4708766 (1987-11-01), Hynecek
patent: 4716447 (1987-12-01), Savoye

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