Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1997-10-21
2000-09-19
Powell, William
Coating processes
Coating by vapor, gas, or smoke
Metal coating
427252, 427253, 4272552, 4274197, 438653, 438688, H01L 21302
Patent
active
061208426
ABSTRACT:
A process for producing conformal and stable TiN+Al films, which provides flexibility in selecting the chemical composition and layering. In this new process, porous TiCN is first deposited, and then Al is incorporated by exposing the porous film to CVD aluminum conditions at low temperatures.
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Hong Qi-Zhong
Hsu Wei-Yung
Lu Jiong-Ping
Goudreau George
Hoel Carlton H.
Powell William
Telecky Jr. Frederick J.
Texas Instruments Incorporated
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