Time weighted moving average filter

Details Time weighted moving average filter Time weighted moving average filter

2006-04-06

2009-06-02

Barnes-Bullock, Crystal J (Department: 2121)

Data processing: measuring, calibrating, or testing

Measurement system

Measured signal processing

C702S084000, C702S179000, C702S183000, C702S199000, C700S029000, C700S052000, C700S109000, C700S121000, C703S002000

Reexamination Certificate

active

07542880

ABSTRACT:
A method for estimating a state associated with a process includes receiving a state observation associated with the process. The state observation has an associated process time. A weighting factor to discount the state observation is generated based on the process time. A state estimate is generated based on the discounted state observation. A system includes a process tool, a metrology tool, and a process controller. The process tool is operable to perform a process in accordance with an operating recipe. The metrology tool is operable to generate a state observation associated with the process. The process controller is operable to receive the state observation, the state observation having an associated process time, generate a weighting factor to discount the state observation based on the process time, generate a state estimate based on the discounted state observation, and determine at least one parameter of the operating recipe based on the state estimate.

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