Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2007-05-08
2008-12-16
Chawan, Sheela C (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C324S501000, C324S754090
Reexamination Certificate
active
07466852
ABSTRACT:
A system for probe-less non-invasive detection of electrical signals from integrated circuit devices is disclosed. The system includes an illumination source, collection optics, imaging optics, and a photon sensor. In a navigation mode, the light source is activated and the imaging optics is used to identify the target area on the chip and appropriately position the collection optics. Once the collection optics is appropriately positioned, the light source is deactivated and the photon sensor is used to detect photons emitted from the chip. No mention of cooling (active device measurement capability) and advanced optics to detect the features (SIL).
REFERENCES:
patent: 3524694 (1970-08-01), Klein
patent: 3711186 (1973-01-01), O'Conner
patent: 3912378 (1975-10-01), Goto
patent: 4297032 (1981-10-01), Temple
patent: 4353618 (1982-10-01), Hagner
patent: 4555767 (1985-11-01), Case .
patent: 4615620 (1986-10-01), Noguchi
patent: 4625114 (1986-11-01), Bosacchi
patent: 4634234 (1987-01-01), Baumann
patent: 4637733 (1987-01-01), Charles et al.
patent: 4680635 (1987-07-01), Khurana
patent: 4724322 (1988-02-01), Knowles
patent: 4755874 (1988-07-01), Esrig et al.
patent: 4758092 (1988-07-01), Heinrich
patent: 4811090 (1989-03-01), Khurana
patent: 4870355 (1989-09-01), Kufis et al.
patent: 4897762 (1990-01-01), Daikoku et al.
patent: 5004307 (1991-04-01), Kino et al.
patent: 5057771 (1991-10-01), Pepper
patent: 5087121 (1992-02-01), Kakuchi
patent: 5126569 (1992-06-01), Carlson
patent: 5208648 (1993-05-01), Batchelder
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5220804 (1993-06-01), Tilton et al.
patent: 5247392 (1993-09-01), Plies
patent: 5270643 (1993-12-01), Richardson et al.
patent: 5282088 (1994-01-01), Davidson
patent: 5314529 (1994-05-01), Tilton et al.
patent: 5475316 (1995-12-01), Hurley
patent: 5515910 (1996-05-01), Hamilton et al.
patent: 5719444 (1998-02-01), Tilton et al.
patent: 5880931 (1999-03-01), Tilton et al.
patent: 5889593 (1999-03-01), Bareket
patent: 5900755 (1999-05-01), Toeppen et al.
patent: 5940545 (1999-08-01), Kash et al.
patent: 6016187 (2000-01-01), Noguchi et al.
patent: 6028952 (2000-02-01), Kash et al.
patent: 6140141 (2000-10-01), Davidson
patent: 6172512 (2001-01-01), Evans et al.
patent: 6229600 (2001-05-01), Martynov
patent: 6270696 (2001-08-01), Jain et al.
patent: 6447270 (2002-09-01), Schmidt et al.
patent: 6571569 (2003-06-01), Rini et al.
patent: 6608494 (2003-08-01), Bruce et al.
patent: 6621275 (2003-09-01), Cotton et al.
patent: 6657446 (2003-12-01), Goruganthu et al.
patent: 6788093 (2004-09-01), Aitren et al.
patent: 6819117 (2004-11-01), Wilsher
patent: 6857283 (2005-02-01), Tilton et al.
patent: 6880350 (2005-04-01), Tilton
patent: 6889509 (2005-05-01), Cader et al.
patent: 6961672 (2005-11-01), Kasapi
patent: 4244268 (1994-07-01), None
patent: 653626 (1995-05-01), None
patent: 0 937 989 (1999-08-01), None
patent: 09/77192 (2000-02-01), None
patent: 11273132 (1999-08-01), None
patent: WO 97/41556 (1997-11-01), None
patent: WO 00/79313 (2000-12-01), None
US 6,304,668, 10/2001, Evans et al. (withdrawn)
Khurana, N. and Chiang, C-L, “Analysis of Product Hot Electron Problems By Gated Emission Microscopy,” Intel Corp., Jun. 1986, pp. 189-194, IEEE/IRPS, U.S.A.
D. Porat,Review of Sub-Nanosecond Timer-Interval Measurements, IEEE Transactions on Nuclear Science, vol. NS-20, No. 5, 1973, pp. 36-51.
M. Fahmie,A System for Providing High Quality Triggers to Experimental Areas, Proceedings of the Particle Accelerator Conference1999, Mar. 27, 1999, pp. 756-758.
J. Bude,Hot-carrier luminescence in Si, Phys. Rev. B, 45(11), Mar. 15, 1992, pp. 5848-5856.
S. Villa et al.,Photon emission from hot electrons in silicon, Phys. Rev. B, 52(15), Oct. 15, 1995-I, pp. 10993-10999.
J. Kash et al.,Full Chip Optical Imaging of Logic State Evolution in CMOS Circuits, IEDM 96 Late News Paper (1996) 1, pp. 934-936.
D. Knebel et al.,Diagnosis and Characterization of Timing-Related Defects by Time-Dependent Light Emission, ITC Proceedings 1998.
M. Bruce et al.,Waveform Acquisition from the Backside of Silicon Using Electro-Optic Probing, Proceedings From the 25thInternational Symposium for Testing and Failure Analysis, Nov. 14-18, 1999, pp. 19-25.
T. Eiles et al.,Optical Probing of VLSI IC's from the Silicon Backside, Proceedings From the 25thInternational Symposium for Testing and Failure Analysis, Nov. 14-18, 1999, pp. 27-33.
M. McManus,Picosecond Imaging Circuit Analysis of the IBM G6 Microprocessor Cache, Proceedings From the 25thInternational Symposium for Testing and Failure Analysis, Nov. 14-18, 1999, pp. 35-38.
N. Goldblatt et al.,Unique and Practical IC Timing Analysis Tool Utilizing Intrinsic Photon Emission, Microelectronics Reliability 41 (2001) 1507-1512.
G. Dajee et al.,Practical, Non-Invasive Optical Probing for Flip-Chip Devices, ITC Paper 15.3 (Baltimore, Oct. 28-Nov. 2, 2001) 433-442.
IDS® PICA, Advanced Optical Imaging for Analysis of 0.13-micron and SOI Devices, Schlumberger Semiconductor Solutions brochure printed Mar. 2001, four pages.
Cotton Daniel Murdoch
Pakdaman Nader
Vickers James Squire
Wong Thomas
Bach, Esq. Joseph
Chawan Sheela C
DCG Systems, Inc.
Nixon & Peabody LLP
LandOfFree
Time resolved non-invasive diagnostics system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Time resolved non-invasive diagnostics system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Time resolved non-invasive diagnostics system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4050081