Time resolved non-invasive diagnostics system

Details Time resolved non-invasive diagnostics system Time resolved non-invasive diagnostics system

2007-05-29

2007-05-29

Chawan, Sheela (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C324S537000, C324S754090, C324S758010

Reexamination Certificate

active

10457968

ABSTRACT:
A system for probe-less non-invasive detection of electrical signals from integrated circuit devices is disclosed. The system includes an illumination source, collection optics, imaging optics, and a photon sensor. In a navigation mode, the light source is activated and the imaging optics is used to identify the target area on the chip and appropriately position the collection optics. Once the collection optics is appropriately positioned, the light source is deactivated and the photon sensor is used to detect photons emitted from the chip. No mention of cooling (active device measurement capability) and advanced optics to detect the features (SIL).

REFERENCES:
patent: 4637733 (1987-01-01), Charles et al.
patent: 5057771 (1991-10-01), Pepper
patent: 5270643 (1993-12-01), Richardson et al.
patent: 5900755 (1999-05-01), Toeppen et al.
patent: 5940545 (1999-08-01), Kash et al.
patent: 6028952 (2000-02-01), Kash et al.
patent: 6172512 (2001-01-01), Evans et al.
patent: 6229600 (2001-05-01), Martynov
patent: 6270696 (2001-08-01), Jain et al.
patent: 6608494 (2003-08-01), Bruce et al.
patent: 6621275 (2003-09-01), Cotton et al.
patent: 6657446 (2003-12-01), Goruganthu et al.
patent: 6788093 (2004-09-01), Aitren et al.
patent: 6819117 (2004-11-01), Wilsher
patent: 4244268 (1994-07-01), None
patent: 0 937 989 (1999-08-01), None
patent: 0977192 (2000-02-01), None
patent: 11273132 (1999-08-01), None
patent: WO97/41556 (1997-11-01), None
US 6,304,668, 10/2001, Evans et al. (withdrawn)
D. Porat,Review of Sub-Nanosecond Timer-Interval Measurements, IEEE Transactions on Nuclear Science, vol. NS-20, No. 5, 1973, pp. 36-51.
M. Fahmie,A System for Providing High Quality Triggers to Experimental Areas, Proceedings of the Particle Accelerator Conference1999, Mar. 27, 1999, pp. 756-758.
J. Bude,Hot-carrier luminescence in Si, PHYS. REV. B, 45(11), Mar. 15, 1992, pp. 5848-5856.
S. Villa et al.,Photon emission from hot electrons in silicon, PHYS. REV. B, 52(15), Oct. 15 1995-I, pp. 10993-10999.
J. Kash et al.,Full Chip Optical Imaging of Logic State Evolution in CMOS Circuits, IEDM 96 Late News Paper (1996) 1, pp. 934-936.
D. Knebel et al.,Diagnosis and Characterization of Timing-Related Defects by Time-Dependent Light Emission, ITC PROCEEDINGS 1998.
M. Bruce et al.,Waveform Acquisition from the Backside of Silicon Using Electro-Optic Probing, Proceedings From the 25thInternational Symposium for Testing and Failure Analysis, Nov. 14-18, 1999, pp. 19-25.
T. Eiles et al.,Optical Probing of VLSI IC's from the Silicon Backside, Proceedings From the 25thInternational Symposium for Testing and Failure Analysis, Nov. 14-18, 1999, pp. 27-33.
M. McManus,Picosecond Imaging Circuit Analysis of the IBM G6 Microprocessor Cache, Proceedings From the 25thInternational Symposium for Testing and Failure Analysis, Nov. 14-18, 1999, pp. 35-38.
N. Goldblatt et al.,Unique and Practical IC Timing Analysis Tool Utilizing Intrinsic Photon Emission, Microelectronics Reliability 41 (2001) 1507-1512.
G. Dajee et al.,Practical, Non-Invasive Optical Probing for Flip-Chip Devices, ITC Paper 15.3 (Baltimore, Oct. 28-Nov. 2, 2001) 433-442.
IDS® PICA, Advanced Optical Imaging for Analysis of 0.13-micron and SOI Devices, Schlumberger Semiconductor Solutions brochure printed Mar. 2001, four pages.
Khurana, N. and Chiang, C-L, “Analysis of Product Hot Electron Problems By Gated Emission Microscopy,” Intel Corp., Jun. 1986, pp. 189-194, IEEE/IRPS, U.S.A.

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