Time-optimal setpoint generator in a lithographic apparatus

Details Time-optimal setpoint generator in a lithographic apparatus Time-optimal setpoint generator in a lithographic apparatus

2008-03-11

2008-03-11

Huff, Mark E. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C700S063000, C700S121000

Reexamination Certificate

active

07341822

ABSTRACT:
The present invention discloses a lithographic apparatus, a device manufacturing method, and a robotics system capable of specifying a trajectory to be followed by a substrate relative to a radiation beam comprising a position and/or an orientation as a function of time. The specified trajectory is characterized as a mathematical smooth function up to at least the third order which connects a first state and a second state, wherein both the first state and the second state comprise boundary values for at least the position and/or the orientation and for first and second derivatives of the position and/or orientation.

REFERENCES:
patent: 6260282 (2001-07-01), Yuan et al.
patent: 6320345 (2001-11-01), Yuan et al.
patent: 2001/0021009 (2001-09-01), Yuan et al.
patent: 2003/0014211 (2003-01-01), Curey et al.
patent: 1 422 569 (2004-05-01), None
patent: 1 596 425 (2005-11-01), None
patent: 09-246360 (1997-09-01), None
patent: 2000-40658 (2000-02-01), None
patent: 2000-089814 (2000-03-01), None
patent: WO 01/88638 (2001-11-01), None
“European Search Report dated Feb. 2, 2004.”
European Search Report issued for European Patent Application No. 04075556.3-2222, dated May 24, 2006.
English translation of Japanese Office Action issued in Japanese Patent Application No. 2004-047979 mailed Jan. 26, 2007.

Affiliated with

Also associated with

Rating

Time-optimal setpoint generator in a lithographic apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Time-optimal setpoint generator in a lithographic apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Time-optimal setpoint generator in a lithographic apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2802542