Tilting positioner for a micropositioning device

Details Tilting positioner for a micropositioning device Tilting positioner for a micropositioning device

1996-02-09

1997-05-06

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, G01N 2300

Patent

active

056273711

ABSTRACT:
A scanning probe microscope positioner including an elongated rigid member which is controllably tilted in a predictable manner. One end of the rigid member is subjected to differential motion on opposite sides of its longitudinal axis so as to cause its opposite end to partake of lateral displacement which is a magnification of the differential motion. By a careful selection of component materials and sizes, inherent thermal compensation can be attained.

REFERENCES:
patent: 5103094 (1992-04-01), Hayes et al.
patent: 5173605 (1992-12-01), Hayes et al.
patent: 5200617 (1993-04-01), Hayes et al.
patent: 5306919 (1994-04-01), Elings et al.
patent: 5325010 (1994-06-01), Besocke et al.
"Dimensional metrology with scanning probe microscopes"--J. E. Griffith et al --J. Appl. Phys., vol. 74, No. 9, Nov. 1, 1993 --pp. 83-109.

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