Through silicon via with dummy structure and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration

Reexamination Certificate

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Details

C257S773000, C257SE23070, C257SE23174, C438S637000

Reexamination Certificate

active

07969013

ABSTRACT:
A through silicon via structure includes a top pad and a vertical conductive post that is connected to the top pad. The top pad covers a wider area than the cross section of the vertical conductive post. An interconnect pad is formed at least partially below the top pad. An under layer is also formed at least partially below the top pad. At least one dummy structure connects the top pad and the under layer to fasten the top pad and the interconnect pad.

REFERENCES:
patent: 7605080 (2009-10-01), Koizumi et al.

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