Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate
2005-02-08
2005-02-08
Versteeg, Steven (Department: 1753)
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
C204S192320, C204S192370, C204S192230, C428S118000
Reexamination Certificate
active
06852203
ABSTRACT:
A three-dimensional periodical structure whose period is about 1 μm or smaller is provided. At least two kinds of films which have two-dimensionally substantially periodical projections are successively formed in layers substantially periodical to construct structure which is substantially three-dimensionally periodical. For instance, the films are made of materials different in refractive index. The three-dimensional periodical structure whose period is about 1 μm or smaller can be obtained by a simple fabricating method. By this structure, the propagation of a wave with a specific wavelength in many solid angular directions including several axial directions parallel to the plane and the thickness direction of the layers can be cut off.
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Kawakami Shojiro
Sakaki Hiroyuki
Shiraishi Kazuo
Autocloning Technology, LTD
Knuth Randall J
Versteeg Steven
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