Three dimensional microfabrication

Details Three dimensional microfabrication Three dimensional microfabrication

2005-12-20

2005-12-20

Everhart, Caridad (Department: 2891)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S764000

Reexamination Certificate

active

06977223

ABSTRACT:
Method for making three-dimensional structures. A template is provided having at least two conductive regions separated by a non-conductive region. The template is disposed in an electrolyte in an electrodeposition cell and a voltage is established between one of the conductive regions and an electrode in the cell. Material is deposited on the one of the conductive regions connected to the voltage and subsequently bridges to the other conductive region with material deposition continuing on both of the at least two regions. The non conductive region may be a gap and the gap dimension is selected to regulate height differences between the at least two conductive regions.

REFERENCES:
patent: 4936956 (1990-06-01), Wrighton
patent: 2237291 (1991-05-01), None

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