Static information storage and retrieval – Floating gate – Particular biasing
Patent
1990-03-09
1990-10-16
Clawson, Jr., Joseph E.
Static information storage and retrieval
Floating gate
Particular biasing
357 234, 357 235, 357 55, G11C 1140
Patent
active
049640801
ABSTRACT:
A three-dimensional floating gate memory cell including an integral select gate transistor is disclosed. Source and drain are formed in a silicon substrate wherein the drain is formed under a slot which has been etched into the body of the substrate. In this way, the channel defined between the source and drain has both horizontal and vertical regions. The cell also includes a floating gate, which is completely surrounded with insulation, and a control gate which is insulated above and extends over the floating gate. The control gate is also insulated above and extends over the vertical portion of the channel within the slot. This allows the second gate member to regulate the current flowing in the vertical portion of the channel; that is, the second gate member and the vertical channel section form an integral select device.
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Clawson Jr. Joseph E.
Intel Corporation
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