Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1983-01-13
1985-09-03
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356363, G01B 902
Patent
active
045389110
ABSTRACT:
The invention relates to a three-dimensional length-measuring device which employs optical interferometry and in which the comparator principle is satisfied as excellently as possible with respect to all three axes. For this purpose, a workpiece holder which is displaceable in orthogonal horizontal directions carries a three-dimensional reflecting body which defines a measurement space and is in the form of three mutually perpendicular adjacent mirrors (triple mirrors). Extensions of measurement beams with which the three-dimensional reflecting body is measured intersect at a point only slightly offset from the workpiece holder, and to obtain high thermal stability, the measurement table and the housing of the measuring device are made of a material of low thermal expansion. In order to determine each coordinate of the position of a movable probe pin with interferometric precision of measurement, a first one of the individual beams of a double-beam flat-mirror interferometer is provided for each coordinate and is directed via a triple prism fixed with respect to the probe-pin holder. The other individual beam of the interferometer is in each case used to directly measure the opposing mirror of the three-dimensional body connected with the workpiece. Interferometer heads themselves are fixedly mounted on the machine. The probe-pin holder which in terms of the optical system need only carry the triple prisms, therefore is of very low weight.
REFERENCES:
patent: 3661463 (1972-05-01), Brainard et al.
patent: 3692413 (1972-09-01), Marcy et al.
patent: 3796494 (1974-03-01), Takabayashi
patent: 3884580 (1975-05-01), Webster et al.
patent: 4043671 (1977-08-01), Goodwin
patent: 4153370 (1979-05-01), Corey, III
patent: 4261107 (1981-04-01), Coleman et al.
patent: 4365301 (1982-12-01), Arnold et al.
Heynacher Erich
Ludewig Reinhard
Carl-Zeiss-Stiftung
Koren Matthew W.
Willis Davis L.
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