4. Optical: systems and elements
  5. Deflection using a moving element
  6. Using a periodically moving element

Reinhard Ludewig

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Three-dimensional interferometric length-measuring apparatus

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
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Tilt mirror arrangement

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
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Profile ID: LFUS-PAI-P-400852

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