Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1993-12-28
1995-02-21
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430270, 430325, 522 50, 522 53, G03C 1725, G03C 173
Patent
active
053914643
ABSTRACT:
The present invention relates to thioxanthone sensitizers for radiation sensitive polyimide compositions for use in manufacturing integrated circuits such as chips, thin film packaging and printed circuit boards.
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Fischer, "105 Aromatic Nucleophilic Substitution Part 3.sup.1) Preparation of Novel 9-Oxo-9H-thoxanthene- and 9-Oxo-9H-xanthenedicarboximides and -dicarboxylates" Helvetical Chimica Acta-vol. 74 (1991).
Afzali-Ardakani Ali
Brock Phillip J.
Dawson Daniel J.
Gelorme Jeffrey D.
International Business Machines - Corporation
Martin Robert B.
McCamish Marion E.
Weiner Laura S.
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