Thinning a diamond body by means of molten rare-earth-containing

Details Thinning a diamond body by means of molten rare-earth-containing Thinning a diamond body by means of molten rare-earth-containing

1992-10-02

1994-07-12

Breneman, R. Bruce

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156 60, 156625, 156629, 156650, H01L 2100

Patent

active

053285506

ABSTRACT:
A diamond body, such as a CVD diamond film, is thinned by placing the body--at an elevated temperature and under pressure--in contact with a molten or partially molten alloy of a rare earth metal and a metallic impurity that lowers the melting point of the rare earth metal. Typically, the rare earth metal is cerium and the impurity is nickel.
The pressure is typically less than approximately 0.2 MPa (Mega Pascal), preferably less than approximately 0.02 MPa, and the temperature is within a range whose lower limit is approximately 100 C. degrees below the melting point of the alloy of the rare earth plus impurity metal.

REFERENCES:
"Diamond Growth Rates", 1971; J. Phys. Chem., 75 (12); Wentorf; pp. 1833-1837.
"Wettability and Contact Interaction of Metallic Melts With Diamond and Cubic Boron Nitride".
Lint, Almazy Prom-Sti, Doke Nauchn, Loobhch, for Zarut. Uch. Spets.; Mezhelumer. Konf; Meeting Date 1971; 32-6; 1971; abstract only.
"Classification of Phase Diagrams of Metal-Carbon Systems in Relation to Diamond Synthesis"; Butylenko et al.; 1977; Lint Almozey, (4); 9-13, abstract only.
"Importance of the Experimental Growth and Dissolution of Diamond Crystals In Metal-Carbon Systems for Understanding Some Aspects of Natural Diamond origin"; Eksp. Issled. Mineroloobrozov Dukhikh Okisnykh Lilkot List; Litvin et al.; 1972; abstract only.
"Adhession Interaction and Contact Entectie Melting of Diamond With Metals"; Sim Almazy, 3(6), 1971, abstract only.
"Development and Performance of a Diamond Film Polishing Apparatus with Hot Metals"; S.P.I.E., vol. 1325, Diamond Optics; 1990; Yoskikaory; pp. 210-219.
"Polishing of CVD Diamond Film"; 1991; Tzeng et al.; "Applications of Diamond Films" and Related Materials; pp. 241-248.
Graebner, J. E. et al., "Unusually High Thermal Conductivity in Diamond Films," Applied Physics Letters, vol. 60, pp. 1576-1578 (Mar. 30, 1992).
Jin, S. et al., "Massive Thinning of Diamond Films by a Diffusion Process," Applied Physics Letters, vol. 60, pp. 1948-1950 (Apr. 20, 1992).
U.S. Ser. No. 07/908130 to Dautremont-Smith, W. C. et al. Application Pending filed on Jul. 2, 1992.
U.S. Ser. No. 07/08202470 to Graebner, J. E. et al. Application Pending filed on Jan. 17, 1992.

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